Nanomechanical Properties of High-Κ Dielectrics Grown by Atomic Layer Deposition
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SPIE - The International Society of Optical Engineering |
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Experimental Study of ALD HfO2 Deposited on Strained Silicon-on-Insulator (sSOI & xsSOI) and SOI
Electrochemical Society |
Materials Research Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |