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Optimization of 3-D topography measurement based on Moir6 technique

著者名:
  • L. Nie ( Xi'an Institute of Technology, China )
  • J. Han ( Xi'an Institute of Technology, China )
  • X. Yu ( Xi'an Institute of Technology, China )
  • B. Liu ( Xi'an Institute of Technology, China )
掲載資料名:
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
7283
発行年:
2009
巻:
2
開始ページ:
728347-1
終了ページ:
728347-5
総ページ数:
5
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819475435 [0819475432]
言語:
英語
請求記号:
P63600/7283
資料種別:
国際会議録

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