Research on collective cracks' strain field with digital real-time holography
- 著者名:
- R. X. Guo ( Kunming Univ. of Science and Technology, China )
- H. T. Xia ( Kunming Univ. of Science and Technology, China )
- Z. B. Fan ( Kunming Univ. of Science and Technology, China )
- B. C. Yang ( Kunming Univ. of Science and Technology, China )
- J. C. Li ( Kunming Univ. of Science and Technology, China )
- 掲載資料名:
- 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 7283
- 発行年:
- 2009
- 巻:
- 2
- 開始ページ:
- 72833T-1
- 終了ページ:
- 72833T-5
- 総ページ数:
- 5
- 出版情報:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819475435 [0819475432]
- 言語:
- 英語
- 請求記号:
- P63600/7283
- 資料種別:
- 国際会議録
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Direct to digital holography for semiconductor wafer defect detection and review(Invited Paper)
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