Optical properties of amorphous silicon thin films fabricated by RF magnetron sputtering

Optical properties of amorphous silicon thin films fabricated by RF magnetron sputtering

著者名:

B. Liu ( Wuhan Univ. of Technology, China )
Q. Zhao ( Wuhan Univ. of Technology, China )
P. Zhena ( Wuhan Univ. of Technology, China )

掲載資料名:

Photonics and Optoelectronics Meetings (POEM) 2008 : optoelectronic devices and integration : 24-27 November 2008, Wuhan, China

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

7279

発行年:

2009

開始ページ:

72791W-1

終了ページ:

72791W-11

総ページ数:

11

出版情報:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819475381 [0819475386]

言語:

英語

請求記号:

P63600/7279

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00052800
シリーズID:	PA00000029
会議名:	Photonics and Optoelectronics Meetings - POEM
回次:	2008
会議開催地:	Wuhan, China
会議開催年:	2008.11.24-2008.11.27
論文注記:	Photonics and Optoelectronics Meetings (POEM) 2008, 24-27 November 2008, Wuhan, China - Optoelectronic Devices and Integration, 72791W, 7279-147

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