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Polycrystalline silicon thin films crystallized by green laser

著者名:
  • Z. Yuan ( Shanghai Institute of Optics and Fine Mechanics, China )
  • Q. Lou ( Shanghai Institute of Optics and Fine Mechanics, China )
  • J. Zhou ( Shanghai Institute of Optics and Fine Mechanics, China )
  • X. Liu ( Shanghai Institute of Optics and Fine Mechanics, China )
  • W. Wang ( Shanghai Institute of Optics and Fine Mechanics, China )
掲載資料名:
Photonics and Optoelectronics Meetings (POEM) 2008 : laser technology and applications : 24-27 November 2008 Wuhan, China
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
7276
発行年:
2009
開始ページ:
727606-1
終了ページ:
727606-7
総ページ数:
7
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819475350 [0819475351]
言語:
英語
請求記号:
P63600/7276
資料種別:
国際会議録

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