Low-temperature processing of PZT thin films by 2.45 GHz microwave heating

Low-temperature processing of PZT thin films by 2.45 GHz microwave heating

著者名:

Z. J. Wang ( Institute of Metal Research, China )
Y. Otsuka ( Tohoku Univ., Japan )
Z. Cao ( Tohoku Univ., Japan )
M. W. Zhu ( Institute of Metal Research, China )
N. Yoshikawa ( Tohoku Univ., Japan )

掲載資料名:

Smart materials V : 10-12 December 2008, Melbourne, Australia

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

7267

発行年:

2008

開始ページ:

726702-1

終了ページ:

726702-8

総ページ数:

8

出版情報:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819475190 [081947519X]

言語:

英語

請求記号:

P63600/7267

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00052793
シリーズID:	PA00000029
会議名:	Smart Materials, Nano-, and Micro- Smart Systems : Smart Materials
回次:	2008 : 5th
会議開催地:	Melbourne, Australia
会議開催年:	2008.12.10-2008.12.12
論文注記:	Smart Materials V, 10-12 December 2008, Melbourne, Australia - Session 1. Thin Films, Invited paper, 726702, 7267-01

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