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Vibration influence and error compensation of aspherical surface interferometer

著者名:
  • H. Wang ( Xi'an Technological Univ., China )
  • J. Cao ( Xi'an Thermal Power Research Institute, China )
  • A. Tian ( Xi'an Technological Univ., China )
  • B. Liu ( Xi'an Technological Univ., China )
掲載資料名:
Ninth International Symposium on Laser Metrology
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
7155
発行年:
2008
巻:
2
開始ページ:
71552V-1
終了ページ:
71552V-8
総ページ数:
8
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819473981 [0819473987]
言語:
英語
請求記号:
P63600/7155
資料種別:
国際会議録

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