Influence of line edge roughness (LER) on angular resolved and on spectroscopic scatterometry

Influence of line edge roughness (LER) on angular resolved and on spectroscopic scatterometry

著者名:

T. Schuster ( Univ. Stuttgart, Germany )
S. Rafler ( Univ. Stuttgart, Germany )
K. Frenner ( Univ. Stuttgart, Germany )
W. Osten ( Univ. Stuttgart, Germany )

掲載資料名:

Ninth International Symposium on Laser Metrology

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

7155

発行年:

2008

巻:

1

開始ページ:

71550W-1

終了ページ:

71550W-12

総ページ数:

12

出版情報:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819473981 [0819473987]

言語:

英語

請求記号:

P63600/7155

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00052786
シリーズID:	PA00000029
会議名:	International Symposium on Laser Metrology
回次:	2008 : 9th
会議開催地:	Singapore
会議開催年:	2008.06.30-2008.07.02
論文注記:	9th International Symposium on Laser Metrology, June 30-July 2 2008, Singapore - Special Session: High Resolution Metrology, 71550W, 7155-31

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