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Development of high-temperature piezoresistive pressure sensor based silicon on insulator

著者名:
  • S. Pang ( Shenyang Academy of Instrumentation Science, China )
  • X. Li ( Shenyang Academy of Instrumentation Science, China )
  • Q. Liu ( Shenyang Academy of Instrumentation Science, China )
  • K. Xu ( Shenyang Academy of Instrumentation Science, China )
掲載資料名:
Fifth International Symposium on Instrumentation Science and Technology
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
7133
発行年:
2008
巻:
2
開始ページ:
71334O-1
終了ページ:
71334O-6
総ページ数:
6
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819473677 [0819473677]
言語:
英語
請求記号:
P63600/7133
資料種別:
国際会議録

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