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FPGA-based distortion correction for laser spot inspection system

著者名:
  • Z. Zhang ( Tianjin Univ., China )
  • Y. Han ( Tianjin Univ., China )
  • X. Chen ( Tianjin Univ., China )
  • D. Yu ( Tianjin Univ., China )
掲載資料名:
Fifth International Symposium on Instrumentation Science and Technology
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
7133
発行年:
2008
巻:
1
開始ページ:
71330R-1
終了ページ:
71330R-8
総ページ数:
8
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819473677 [0819473677]
言語:
英語
請求記号:
P63600/7133
資料種別:
国際会議録

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