Error measuring, modeling, and compensation of precision motion table driven by linear motors
- 著者名:
- 掲載資料名:
- Fourth International Symposium on Precision Mechanical Measurements
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 7130
- 発行年:
- 2008
- 巻:
- 2
- 開始ページ:
- 71305D-1
- 終了ページ:
- 71305D-6
- 総ページ数:
- 6
- 出版情報:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819473646 [0819473642]
- 言語:
- 英語
- 請求記号:
- P63600/7130
- 資料種別:
- 国際会議録
類似資料:
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
Trans Tech Publications |
SPIE-The International Society for Optical Engineering |
Trans Tech Publications |
Trans Tech Publications |
4
国際会議録
Design for the miniaturized rotary table of the high-precision and high-speed phototheodolite
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
5
国際会議録
A Novel Evaluation Method on the Precision of Linear Motor Feed System in High-Speed Machine Tools
Trans Tech Publications |
SPIE - The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |