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A system-level simulation of force-balance MEMS accelerometers by VHDL_AMS

著者名:
  • X. Tang ( Harbin Institute of Technology, China )
  • Y. Zhang ( Harbin Institute of Technology, China )
  • W. Chen ( Harbin Institute of Technology, China )
  • X. Liu ( Harbin Institute of Technology, China )
掲載資料名:
Fourth International Symposium on Precision Mechanical Measurements
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
7130
発行年:
2008
巻:
1
開始ページ:
71300R-1
終了ページ:
71300R-6
総ページ数:
6
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819473646 [0819473642]
言語:
英語
請求記号:
P63600/7130
資料種別:
国際会議録

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