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Multifunctional automatic tester for optical storage and lithography

著者名:
  • Y. Fan ( Shanghai Institute of Optics and Fine Mechanics, China )
  • W. Xu ( Shanghai Institute of Optics and Fine Mechanics, China )
  • C. Lu ( Shanghai Institute of Optics and Fine Mechanics, China )
  • Q. Liu ( The National Ctr. for Nanoscience and Technology of China, China )
  • C. Guo ( The National Ctr. for Nanoscience and Technology of China, China )
掲載資料名:
Eighth International Symposium on Optical Storage and 2008 International Workshop on Information Data Storage : 24-27 November 2008, Wuhan, China
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
7125
発行年:
2008
開始ページ:
712522-1
終了ページ:
712522-5
総ページ数:
5
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819473592 [0819473596]
言語:
英語
請求記号:
P63600/7125
資料種別:
国際会議録

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