Investigations of reactively sputtered TiO<sub>2-δ</sub>films for microbolometer applications

Investigations of reactively sputtered TiO_2-δfilms for microbolometer applications

著者名:

M.-H. Kwon ( i3system Corp., South Korea )
K. Yang ( i3system Corp., South Korea )
Y.-S. Park ( i3system Corp., South Korea )
Y.-H. Kim ( i3system Corp., South Korea )
H. Chung ( i3system Corp., South Korea )

掲載資料名:

Electro-optical and infrared systems : technology and applications V : 16-18 September 2008, Cardiff, Wales, United Kingdom

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

7113

発行年:

2008

開始ページ:

711306-1

終了ページ:

711306-10

総ページ数:

10

出版情報:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819473455 [0819473456]

言語:

英語

請求記号:

P63600/7113

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00052744
シリーズID:	PA00000029
会議名:	SPIE Security and Defence : Electro-Optical and Infrared Systems
回次:	2008 : 5th
会議開催地:	Cardiff, Wales, United Kingdom
会議開催年:	2008.09.16-2008.09.18
論文注記:	Electro-optical and infrared systems: Technology and Applications V, 16-18 September 2008, Cardiff, Wales, United Kingdom - Session 1. IR Detectors and Sensors, 711306, 7113-05

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Investigations of reactively sputtered TiO2-δfilms for microbolometer applications

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Investigations of reactively sputtered TiO_2-δfilms for microbolometer applications