Fabrication of far infrared rib waveguides based on Te-Ge-Ga films deposited by co-thermal evaporation
- 著者名:
- S. Albert ( Institut Charles Gerhardt, France )
- E. Barthelemy ( Institut Charles Gerhardt, France )
- C. Vigreux ( Institut Charles Gerhardt, France )
- A. Pradel ( Institut Charles Gerhardt, France )
- M. Barillot ( Thales Alenia Space, France )
- 掲載資料名:
- Advances in optical thin films III : 2-3 September 2008, Glasgow, United Kingdom
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 7101
- 発行年:
- 2008
- 開始ページ:
- 71011N-1
- 終了ページ:
- 71011N-8
- 総ページ数:
- 8
- 出版情報:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819473318 [0819473316]
- 言語:
- 英語
- 請求記号:
- P63600/7101
- 資料種別:
- 国際会議録
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10
国際会議録
Simulation and fabrication of silicon-oxynitride rib structure arrayed waveguide grating device
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