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SiNx optical thin films prepared by RF ion-beam sputtering and residual stress elimination technique

著者名:
  • K.-H. Lee ( National Central Univ., Taiwan )
  • C.-J. Tang ( National Central Univ., Taiwan )
  • C.-C. Jaing ( Minghsin University of Science and Technology, Taiwan )
  • H.-C. Chen ( De Lin Institute of Technology, Taiwan )
  • C.-C. Lee ( National Central Univ., Taiwan )
掲載資料名:
Advances in thin-film coatings for optical applications V : 11 August, 2008, San Diego, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
7067
発行年:
2008
開始ページ:
70670K-1
終了ページ:
70670K-9
総ページ数:
9
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819472878 [0819472875]
言語:
英語
請求記号:
P63600/7067
資料種別:
国際会議録

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