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Measurement method of optical scatter using a STAR GEM as a scatterometer

著者名:
E. Kawate ( National Institute of Advanced Industrial Science and Technology, Japan )  
掲載資料名:
Reflection, scattering, and diffraction from surfaces : 11-12 August 2008, San Diego, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
7065
発行年:
2008
開始ページ:
706515-1
終了ページ:
706515-9
総ページ数:
9
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819472854 [0819472859]
言語:
英語
請求記号:
P63600/7065
資料種別:
国際会議録

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