Surface plasmon polariton detection discriminating polarization-dependent image dipole effects
- 著者名:
- K. G. Lee ( Seoul National Univ., South Korea )
- K. J. Ahn ( Seoul National Univ., South Korea )
- H. W. Kihm ( Seoul National Univ., South Korea )
- J. S. Ahn ( Seoul National Univ., South Korea )
- D. S. Kim ( Seoul National Univ., South Korea )
- 掲載資料名:
- Plasmonics : nanoimaging, nanofabrication, and their applications IV : 10-14 August 2008, San Diego, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 7033
- 発行年:
- 2008
- 開始ページ:
- 70331B-1
- 終了ページ:
- 70331B-9
- 総ページ数:
- 9
- 出版情報:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819472533 [0819472530]
- 言語:
- 英語
- 請求記号:
- P63600/7033
- 資料種別:
- 国際会議録
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4
国際会議録
Simulation of mask induced polarization effect on imaging in immersion lithography [6154-105]
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