Surface energy control techniques for photomask fabrication and their characterizations with scanning probe microscopy
- 著者名:
- M. Kurihara ( Dai Nippon Printing Co. Ltd., Japan )
- S. Hatakeyama ( Dai Nippon Printing Co. Ltd., Japan )
- K. Yoshida ( Dai Nippon Printing Co. Ltd., Japan )
- M. Abe ( Dai Nippon Printing Co. Ltd., Japan )
- D. Totsukawa ( Dai Nippon Printing Co. Ltd., Japan )
- 掲載資料名:
- Photomask and next-generation lithography mask technology XV
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 7028
- 発行年:
- 2008
- 巻:
- 2
- 開始ページ:
- 70282T-1
- 終了ページ:
- 70282T-7
- 総ページ数:
- 7
- 出版情報:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819472434 [0819472433]
- 言語:
- 英語
- 請求記号:
- P63600/7028
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society of Optical Engineering |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
Society of Photo-optical Instrumentation Engineers |
Kluwer Academic Publishers |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
Electrochemical Society |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |