Separable OPC models for computational lithography
- 著者名:
- H. -Y. Liu ( Brion Technologies, Inc., USA )
- Q. Zhao ( Brion Technologies, Inc., USA )
- J. F. Chen ( Brion Technologies, Inc., USA )
- J. Jiang ( Brion Technologies, Inc., USA )
- R. Socha ( ASML Technology Development Ctr., USA )
- 掲載資料名:
- Photomask and next-generation lithography mask technology XV
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 7028
- 発行年:
- 2008
- 巻:
- 1
- 開始ページ:
- 70280X-1
- 終了ページ:
- 70280X-11
- 総ページ数:
- 11
- 出版情報:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819472434 [0819472433]
- 言語:
- 英語
- 請求記号:
- P63600/7028
- 資料種別:
- 国際会議録
類似資料:
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
5
国際会議録
Halftone biasing OPC technology: an approach for achieving fine bias control on raster-scan systems
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |