Blank Cover Image

Fabrication of polymer micro-optical components for integration in silicon MOEMS

著者名:
  • D. Cristea ( National Institute for Research and Development in Microtechnologies, Romania )
  • P. Obreja ( National Institute for Research and Development in Microtechnologies, Romania )
  • M. Kusko ( National Institute for Research and Development in Microtechnologies, Romania )
  • M. Purica ( National Institute for Research and Development in Microtechnologies, Romania )
  • A. Dinescu ( National Institute for Research and Development in Microtechnologies, Romania )
掲載資料名:
MEMS, MOEMS, and micromachining III : 9-10 April 2008, Strasbourg, France
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6993
発行年:
2008
開始ページ:
699307-1
終了ページ:
699307-10
総ページ数:
10
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471918 [0819471917]
言語:
英語
請求記号:
P63600/6993
資料種別:
国際会議録

類似資料:

1 国際会議録 Silicon waveguide fabrication process based on the anisotropic etching of Si<111>- oriented wafers

Cristea, D., Obreja, P., Manea, E., Kusko, M.

SPIE-The International Society for Optical Engineering
7 国際会議録 Silicon optoelectronic integrated circuits for MOEMS

Cristea,D., Craciunoiu,F., Caldararu,M.F.

SPIE - The International Society for Optical Engineering
2 国際会議録 Bragg reflector based on periodic structures for silicon MOEMS applications

Purica, M. G., Budianu, E., Kusko, M., Dragoman, D., Dinescu, G.

SPIE - The International Society of Optical Engineering
8 国際会議録 SU 8 used as optical waveguide In Integrated optical microsensor for biological applications [5972-35]

M-ller, R., Obreja, P., Kusko, M., Esinenco, D., Tibeica, C., Conache, G., Apostol, D., Damian, V., Mateescu, M., …

SPIE - The International Society of Optical Engineering
3 国際会議録 Optical MEMS components fabrication using micromachning of (111)-oriented silicon wafers

Cristea, D., Manea, E., Kusko, M.

SPIE - The International Society of Optical Engineering
9 国際会議録 White light interferometry for vertical artifact calibration

V. Damian, M. Bojan, A. Sima, D. Cristea, A. Dinescu

Society of Photo-optical Instrumentation Engineers
4 国際会議録 Microphotonic structures based on poly(vinyl alcohol) polymer for chemo- and blosensors [5972-34]

Obreja, P., Manea, E., Budianu, E., Rebigan, R., Kusko, M., Cristea, D.

SPIE - The International Society of Optical Engineering
10 国際会議録 New technique for Si-based microphotonic components fabrication

Cristea, D., Manea, E.

SPIE - The International Society of Optical Engineering
5 国際会議録 Theoretical and numerical analysis of the microring resonator refractometers

M. Kusko, D. Cristea

SPIE - The International Society of Optical Engineering
11 国際会議録 Numerical analysis of microring resonator obtained by wafer-bonding technology [5956-48]

Kusko, M., Alexandropoulos, D., Tee, C.W., Kapsalis, A., Cristea, D., Syvridis, D., Kusko, C.

SPIE - The International Society of Optical Engineering
6 国際会議録 Micromachined tunable optical microfilters: design and experimental processing

Cristea, D., Muller, R., Arguel, P., Kusko, M., Tibeica, C., Syvridis, D.

SPIE - The International Society of Optical Engineering
12 国際会議録 MOEMS for environmental applications: real-time air pollution monitoring system using chemo-optical sensor [5972-30]

Caldararu, M., Vasile, A., Craciunoiu, F., Cristea, D., Paraschiv, A., Caldararu, F.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12