Influence of substrate temperature on the morphology and thermal resistance of vanadium oxide thin films

著者名:

• X. Wei ( Univ. of Electronic Science and Technology of China, China )
• Z. Wu ( Univ. of Electronic Science and Technology of China, China )
• T. Wang ( Univ. of Electronic Science and Technology of China, China )
• X. Xu ( Univ. of Electronic Science and Technology of China, China )
• J. Tang ( Univ. of Electronic Science and Technology of China, China )

掲載資料名:

Sixth International Conference on Thin Film Physics and Applications : 25-28 September 2007, Shanghai, China

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6984

発行年:

2008

開始ページ:

69842K-1

終了ページ:

69842K-4

総ページ数:

4

出版情報:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819471826 [0819471828]

言語:

英語

請求記号:

P63600/6984

資料種別:

国際会議録