Electrically driven optical proximity correction

Electrically driven optical proximity correction

著者名:

S. Banerjee ( Univ. of Texas at Austin, USA )
P. Elakkumanan ( IBM Corp., USA )
L. W. Liebmann ( IBM Corp., USA )
J. A. Culp ( IBM Corp., USA )
M. Orshansky ( Univ. of Texas at Austin, USA )

掲載資料名:

Design for manufacturability through design-process integration II : 28-29 February 2008, San Jose, California, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6925

発行年:

2008

開始ページ:

69251W-1

終了ページ:

69251W-9

総ページ数:

9

出版情報:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819471109 [0819471100]

言語:

英語

請求記号:

P63600/6925

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00052556
シリーズID:	PA00000029
会議名:	SPIE Advanced Lithography : Design for Manufacturability through Design-Process Integration
回次:	2008 : 2nd
会議開催地:	San Jose, California, USA
会議開催年:	2008.02.28-2008.02.29
論文注記:	Design for manufacturability through design-process integration II, 28-29 February 2008, San Jose, California, USA. Poster Session, 69251W, 6925-69

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