Impact of gate line edge roughness on double-gate FinFET performance variability
- 著者名:
- K. Patel ( SanDisk Inc., USA )
- T.-J. King Liu ( Univ. of California, Berkeley, USA )
- C. Spanos ( Univ. of California, Berkeley, USA )
- 掲載資料名:
- Design for manufacturability through design-process integration II : 28-29 February 2008, San Jose, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6925
- 発行年:
- 2008
- 開始ページ:
- 69251I-1
- 終了ページ:
- 69251I-10
- 総ページ数:
- 10
- 出版情報:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819471109 [0819471100]
- 言語:
- 英語
- 請求記号:
- P63600/6925
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
2
国際会議録
Effect of line-edge roughness (LER) and line-width roughness (LWR) on sub-100-nm device performance
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
Electrochemical Society |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
Electrochemical Society |
Electrochemical Society |