Low-k<sub>1</sub> logic design using gridded design rules

Low-k₁ logic design using gridded design rules

著者名:

M. C. Smayling ( Tela Innovations, Inc., USA )
H. Liu ( Brion Technologies, USA )
L. Cai ( Brion Technologies, USA )

掲載資料名:

Design for manufacturability through design-process integration II : 28-29 February 2008, San Jose, California, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6925

発行年:

2008

開始ページ:

69250B-1

終了ページ:

69250B-7

総ページ数:

7

出版情報:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819471109 [0819471100]

言語:

英語

請求記号:

P63600/6925

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00052556
シリーズID:	PA00000029
会議名:	SPIE Advanced Lithography : Design for Manufacturability through Design-Process Integration
回次:	2008 : 2nd
会議開催地:	San Jose, California, USA
会議開催年:	2008.02.28-2008.02.29
論文注記:	Design for manufacturability through design-process integration II, 28-29 February 2008, San Jose, California, USA. Session 3. Design Rules for Manufacturability, 69250B, 6925-68

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Low-k1 logic design using gridded design rules

類似資料:

Low-k₁ logic design using gridded design rules