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Rapid directed self-assembly of Lamellar microdomains from a block copolymer containing hybrid

著者名:
  • H.-C. Kim ( IBM Almaden Research Ctr., USA )
  • J. Cheng ( IBM Almaden Research Ctr., USA )
  • O.-H. Park ( IBM Almaden Research Ctr., USA )
  • S.-M. Park ( IBM Almaden Research Ctr., USA )
  • R. Ruiz ( Hitachi Global Storage Technologies,Inc., USA )
掲載資料名:
Emerging lithographic technologies XII
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6921
発行年:
2008
巻:
2
開始ページ:
692129-1
終了ページ:
692129-8
総ページ数:
8
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819471062 [0819471062]
言語:
英語
請求記号:
P63600/6921
資料種別:
国際会議録

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