Process flow innovations for photonic device integration in CMOS
- 著者名:
- M. Beals ( Massachusetts Institute of Technology, USA )
- J. Michel ( Massachusetts Institute of Technology, USA )
- J. F. Liu ( Massachusetts Institute of Technology, USA )
- D. H. Ahn ( Massachusetts Institute of Technology, USA )
- D. Sparacin ( Massachusetts Institute of Technology, USA )
- 掲載資料名:
- Silicon photonics III : 21-24 January 2008, San Jose, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6898
- 発行年:
- 2008
- 開始ページ:
- 689804-1
- 終了ページ:
- 689804-14
- 総ページ数:
- 14
- 出版情報:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819470737 [0819470732]
- 言語:
- 英語
- 請求記号:
- P63600/6898
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
MRS - Materials Research Society |
Electrochemical Society |
Electrochemical Society |
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
Materials Research Society |
SPIE-The International Society for Optical Engineering |