3D MOEMS-based optical micro-bench platform for the miniaturization of sensing devices

3D MOEMS-based optical micro-bench platform for the miniaturization of sensing devices

著者名:

S. Garcia-Blanco ( INO, Canada )
J.-S. Caron ( INO, Canada )
S. Leclair ( INO, Canada )
P. A. Topart ( INO, Canada )
H. Jerominek ( INO, Canada )

掲載資料名:

MOEMS and miniaturized systems VII : 22-23 January 2008, San Jose, California, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6887

発行年:

2008

開始ページ:

68870F-1

終了ページ:

68870F-9

総ページ数:

9

出版情報:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819470621 [0819470627]

言語:

英語

請求記号:

P63600/6887

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00052518
シリーズID:	PA00000029
会議名:	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MOEMS and Miniaturized Systems
回次:	2008 : 7th
会議開催地:	San Jose, California, USA
会議開催年:	2008.01.22-2008.01.23
論文注記:	MOEMS and miniaturized systems VII, 22-23 January 2008, San Jose, California, USA - Session 5. MOEM Components and Systems I, Best paper award (68870F/6887-14)

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