Confocal microscopy scanned by digital micromirror device with stray light filters
- 著者名:
- C.-C. Hung ( Kao Yuan Univ., Taiwan )
- C.C. Lin ( Metal Industries Research and Development Ctr., Taiwan )
- K.-M Yeh ( Metal Industries Research and Development Ctr., Taiwan )
- Y.-C. Fang ( Kaohsiung First Univ. of Science and Technology, Taiwan )
- J.-H. Wu ( Kaohsiung First Univ. of Science and Technology, Taiwan )
- 掲載資料名:
- Reliability, packaging, testing, and characterization of MEMS/MOEMS VII : 21-22 January 2008, San Jose, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6884
- 発行年:
- 2008
- 開始ページ:
- 68840T-1
- 終了ページ:
- 68840T-11
- 総ページ数:
- 11
- 出版情報:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819470591 [0819470597]
- 言語:
- 英語
- 請求記号:
- P63600/6884
- 資料種別:
- 国際会議録
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