Fabrication of sub-wavelength periodic structures upon high-refractive-index glasses by precision glass molding

Fabrication of sub-wavelength periodic structures upon high-refractive-index glasses by precision glass molding

著者名:

T. Mori ( Konica Minolta Opto,Inc., Japan )
K. Hasegawa ( Konica Minolta Opto,Inc., Japan )
T. Hatano ( Konica Minolta Opto, Inc., Japan )
H. Kasa ( National Institute of Advanced Industrial Science and Technology, Japan )
K. Kintaka ( National Institute of Advanced Industrial Science and Technology, Japan )

掲載資料名:

Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6800

発行年:

2008

開始ページ:

68000M-1

終了ページ:

68000M-10

総ページ数:

10

出版情報:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819469717 [0819469718]

言語:

英語

請求記号:

P63600/6800

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00052431
シリーズID:	PA00000029
会議名:	Smart Materials, Nano-, and Micro- Smart Systems : Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology
回次:	2007 : 4th
会議開催地:	Canberra, Australia
会議開催年:	2007.12.05-2007.12.07
論文注記:	Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV, 5-7 December 2007, Canberra, Australia - Session 6. Nanofabrication Techniques (6800-23)

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