Design and optimization of a novel 20 optical excited self-resonant microaccelerometer

Design and optimization of a novel 20 optical excited self-resonant microaccelerometer

著者名:

Y. Liu ( Chongqing Institute of Technology, China )
L. Liao ( Chongqing Institute of Technology, China )
G. Zheng ( Chongqing Institute of Technology, China )
G. Wang ( Chongqing Institute of Technology, China )
H. Yang ( Chongqing Institute of Technology, China )

掲載資料名:

ICMIT 2007, mechatronics, MEMS, and smart materials

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6794

発行年:

2008

巻:

2

開始ページ:

67943C-1

終了ページ:

67943C-5

総ページ数:

5

出版情報:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819469595 [0819469599]

言語:

英語

請求記号:

P63600/6794

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00052425
シリーズID:	PA00000029
会議名:	ICMIT
回次:	2007
会議開催地:	Gifu, Japan
会議開催年:	2007.12.05-2007.12.06
論文注記:	ICMIT2007, 5-6 December 2007, Gifu, Japan - Mechatronics and MEMS (6794-119)

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