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Performance comparison of techniques for intro-field CD control improvement

著者名:
  • R. Pforr ( Qimonda Dresden GmbH & Co. OHG, Germany )
  • M. Hennig ( Qimonda Dresden GmbH & Co. OHG, Germany )
  • J. Reichelt ( Qimonda Dresden GmbH & Co. OHG, Germany )
  • G. Ben Zvi ( Pixer Technology Ltd., Israel )
  • M. Sczyrba ( Advanced Mask Technology Ctr., Germany )
掲載資料名:
Photomask technology 2007
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6730
発行年:
2007
巻:
2
開始ページ:
673032-1
終了ページ:
673032-9
総ページ数:
9
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819468871 [0819468878]
言語:
英語
請求記号:
P63600/6730
資料種別:
国際会議録

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