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Design, modeling, and fabrication techniques of bulk PZT actuators for MEMS deformable mirrors

著者名:
  • X. Xu ( Univ. of Science and Technology of China, China )
  • J. Chu ( Univ. of Science and Technology of China, China )
掲載資料名:
Design, manufacturing, and testing of micro- and nano-optical devices and systems : 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies : 8-12 July 2007, Chengdu, China
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6724
発行年:
2007
開始ページ:
672403-1
終了ページ:
672403-10
総ページ数:
10
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819468819 [0819468819]
言語:
英語
請求記号:
P63600/6724
資料種別:
国際会議録

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