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High quality HfO2 thin films prepared by reactive ion beam assisted deposition

著者名:
  • C. Wang ( Shanghai Institute of Optics and Fine Mechanics, China )
  • Y. Jin ( Shanghai Institute of Optics and Fine Mechanics, China )
  • J. Shao ( Shanghai Institute of Optics and Fine Mechanics, China )
  • Z. Fan ( Shanghai Institute of Optics and Fine Mechanics, China )
掲載資料名:
Advanced optical manufacturing technologies
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6722
発行年:
2007
巻:
2
開始ページ:
67223X-1
終了ページ:
67223X-7
総ページ数:
7
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819468796 [0819468797]
言語:
英語
請求記号:
P63600/6722
資料種別:
国際会議録

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