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High quality HfO2 thin films prepared by reactive ion beam assisted deposition
- 著者名:
- 掲載資料名:
- Advanced optical manufacturing technologies
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6722
- 発行年:
- 2007
- 巻:
- 2
- 開始ページ:
- 67223X-1
- 終了ページ:
- 67223X-7
- 総ページ数:
- 7
- 出版情報:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819468796 [0819468797]
- 言語:
- 英語
- 請求記号:
- P63600/6722
- 資料種別:
- 国際会議録
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