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Effect of technical parameter on optical constants of amorphous silicon thin film

著者名:
  • S.-B. Li ( Univ. of Electronic Science and Technology of China, China )
  • Z.-M. Wu ( Univ. of Electronic Science and Technology of China, China )
  • K.-P. Zhu ( Univ. of Electronic Science and Technology of China, China )
  • Y.-D. Jiang ( Univ. of Electronic Science and Technology of China, China )
  • W. Li ( Univ. of Electronic Science and Technology of China, China )
掲載資料名:
Advanced optical manufacturing technologies
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6722
発行年:
2007
巻:
1
開始ページ:
67221U-1
終了ページ:
67221U-4
総ページ数:
4
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819468796 [0819468797]
言語:
英語
請求記号:
P63600/6722
資料種別:
国際会議録

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