Simulation of thermoelastic damping of MEMS mirror using a finite element analysis

Simulation of thermoelastic damping of MEMS mirror using a finite element analysis

著者名:

H. Tang ( Univ. of Denver (USA) )
Y.-B. Yi ( Univ. of Denver (USA) )
M. A. Matin ( Univ. of Denver (USA) )

掲載資料名:

Optics and photonics for information processing : 28-30 August 2007, San Diego, California, USA

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6695

発行年:

2007

開始ページ:

66951J-1

終了ページ:

66951J-9

総ページ数:

9

出版情報:

Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers

ISSN:

0277786X

ISBN:

9780819468437 [0819468436]

言語:

英語

請求記号:

P63600/6695

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00052342
シリーズID:	PA00000029
会議名:	SPIE Optical Engineering and Applications : Optics and Photonics for Information Processing
回次:	2007
会議開催地:	San Diego, California, USA
会議開催年:	2007.08.28-2007.08.30
論文注記:	Optics and Photonics for Information Processing, August 28-30, 2007, San Diego, CA, USA - Poster Session (6695-60)

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