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The preparation of AZO films with RF sputtering

著者名:
  • Z. Yu ( Beijing Institute of Technology (China) )
  • J. Xu ( Beijing Institute of Technology (China) )
  • W. Xue ( Beijing Institute of Technology (China) )
  • X. Li ( Beijing Institute of Technology (China) )
  • J. Li ( Beijing Institute of Technology (China) )
掲載資料名:
International Symposium on Photoelectronic Detection and Imaging 2007, optoelectronic system design, manufacturing, and testing : 9-12 September 2007, Beijing China
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6624
発行年:
2008
開始ページ:
66241O-1
終了ページ:
66241O-6
総ページ数:
6
出版情報:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819467669 [0819467669]
言語:
英語
請求記号:
P63600/6624
資料種別:
国際会議録

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