Hydrogen-plasma Etching of Thin Amorphous Silicon Layers for Heterojunction Interdigitated Back-contact Solar Cells

Hydrogen-plasma Etching of Thin Amorphous Silicon Layers for Heterojunction Interdigitated Back-contact Solar Cells

著者名:

Stefano. N. Granata ( IMEC, Heverlee, Belgium )
Twan Bearda
Ivan Gordon
Jef Poortmans
Robert Mertens

掲載資料名:

Film silicon science and technology : symposium held April 1-5, 2013, San Francisco, California U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

1536

発行年:

2013

開始ページ:

27

終了ページ:

32

総ページ数:

6

出版情報:

Warrendale, Pa: Materials Research Society

ISSN:

02729172

ISBN:

9781605115139 [1605115134]

言語:

英語

請求記号:

M23500/1536

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00052290
シリーズID:	PA00000011
会議名:	Film Silicon Science and Technology
回次:	2013
会議開催地:	San Francisco, California U.S.A.
会議開催年:	2013.04.01-2013.04.05
論文注記:	2013 MRS Spring Meeting, Symposium A, April 1-5, 2013, San Francisco, California, USA ; Thin films solar cells

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