Structural and Mechanical Properties of AlN Films by Pulsed Bias Arc Ion Plating
- 著者名:
M. Zhang G.Q. Lin A.M. Wu S.Z. Hao C. Dong L.S. Wen - 掲載資料名:
- PRICM 6 : selected, peer reviewed papers from The sixth Pacific Rim International Conference on Advanced Materials and Processing, November 5-9, 2007, ICC Jeju, Jeju Island, Korea
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 561-565
- 発行年:
- 2007
- 巻:
- 561-565
- パート:
- 2
- 開始ページ:
- 1157
- 終了ページ:
- 1160
- 総ページ数:
- 4
- 出版情報:
- Uetikon-Zuerich: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878494620 [0878494626]
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
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