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In-situ Measurements of Cluster Volume Fraction in Silicon Thin Films Using Quartz Crystal Microbalances

著者名:
Yeonwon Kim
Kosuke Hatozaki
Yuji Hashimoto
Hyunwoong Seo
Giichiro Uchida
Kunihiro Kamataki
Naho Itagaki
Kazunori Koga
Masaharu Shiratani
さらに 4 件
掲載資料名:
Amorphous and polycrystalline thin-film silicon science and technology - 2012 : symposium held April 9-13, 2012, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
1426
発行年:
2012
開始ページ:
307
終了ページ:
312
総ページ数:
6
出版情報:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781605114033 [1605114030]
言語:
英語
請求記号:
M23500/1426
資料種別:
国際会議録

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