High-Rate Deposition of Intrinsic a-Si:H and μc-Si:H Layers for Thin‑Film Silicon Solar Cells using a Dynamic Deposition Process

High-Rate Deposition of Intrinsic a-Si:H and μc-Si:H Layers for Thin‑Film Silicon Solar Cells using a Dynamic Deposition Process

著者名:

T. Zimmermann

掲載資料名:

Amorphous and polycrystalline thin-film silicon science and technology - 2012 : symposium held April 9-13, 2012, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

1426

発行年:

2012

開始ページ:

27

終了ページ:

32

総ページ数:

6

出版情報:

Warrendale, PA: Materials Research Society

ISSN:

02729172

ISBN:

9781605114033 [1605114030]

言語:

英語

請求記号:

M23500/1426

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00051890
シリーズID:	PA00000011
会議名:	MRS Symposium A, Amorphous and Polycrystalline Thin Film Silicon Science and Technology - 2012
回次:	2012
会議開催地:	San Francisco, CA
会議開催年:	2012.04.09-2012.04.13

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