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Modeling the Diffusion Behavior of Implanted Beryllium in Gallium Arsenide Using Suprem - IV

著者名:
掲載資料名:
Proceedings of the Eighteenth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XVIII)
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
1993-27
発行年:
1993
開始ページ:
296
終了ページ:
308
総ページ数:
13
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770699 [1566770696]
言語:
英語
請求記号:
E23400/940142
資料種別:
国際会議録

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