Photoluminescence Study of Residual Damage After MOCVD Regrowth on Reactive Ion Etched InP

Photoluminescence Study of Residual Damage After MOCVD Regrowth on Reactive Ion Etched InP

著者名:

T.R. Hayes

掲載資料名:

Proceedings of the Eighteenth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XVIII)

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

1993-27

発行年:

1993

開始ページ:

256

終了ページ:

262

総ページ数:

7

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566770699 [1566770696]

言語:

英語

請求記号:

E23400/940142

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00051845
シリーズID:	PA00000028
会議名:	Eighteenth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XVIII) : 183rd Meeting of The Electrochemical Society
回次:	18th ; 183rd
会議開催地:	Honolulu, HI
会議開催年:	1993.05.16-1993.05.21

類似資料:

1 国際会議録 TEMPERATURE DEPENDENCE OF ETCH RATE AND RESIDUAL DAMAGE IN REACTIVELY ION ETCHED GaAs AND A1GaAs Pearton, S.J., Jones, K.S., Chakabarti, U.K., Emerson, B., Lane, E., Vasile, M.J., Fullowan, T.R., Hobson, W.S., Short, … Materials Research Society	7 国際会議録 REGROWTH OF DAMAGED LAYERS IN DIAMOND PRODUCED BY ION IMPLANTATION Sandhu, G.S., Liu, B., Parikh, N.R., Hunn, J.D., Swanson, M.L., Wichert, Th., Deicher, M., Skudlik, H., Lennard, W.N., … Materials Research Society
2 国際会議録 CHANNELING STUDIES OF THERMAL REGROWTH IN ION DAMAGED GRAPHITE Venkatesan, T., Elman, B. S., Braustein, G., Dresselhaus, M. S., Dresselhaus, G. North-Holland	8 国際会議録 Atomic Ordering and Spinodal Decomposition in InGaAsP and InGaAs Grown by Atmospheric Pressure Metalorganic Chemical Vapor Deposition Chu, S.N.G., Logan, R.A., Tanbun-Ek, T. Electrochemical Society
3 国際会議録 INTEGRATED DISTRIBUTED FEEDBACK LASER AND OPTICAL AMPLIFIER Dutta, N. K., Lopatta, J., Logan, R., Tanbun-Ek, T. Materials Research Society	9 国際会議録 GROWTH AND CHARACTERIATION OF InP/GaAs ON SOI BY MOCVD Karam, N. H., Haven, V., Vernon, S. M., Namavar, F., El-Masry, N., Haegel, N., Al-Jassim, M. M. Materials Research Society
4 国際会議録 Short Pulse Generation with Monolithic Semiconductor Quantum Well Lasers Wu, M.C., Chen, Y.K., Tanbun-Ek, T., Logan, R.A. Electrochemical Society	10 国際会議録 Reactive ion etch studies of DUV resists Kwong, R. W., Moreau, W. M., Yan, W. SPIE - The International Society of Optical Engineering
5 国際会議録 Ultrawide bandwidth 1.55-ｦﾌm lasers Morton,P.A., Tanbun-Ek,T., Logan,R.A., Shtengel,G.E., Yadvish,R.D., Sergent,A.M., Sciortino,P.F.,Jr. SPIE-The International Society for Optical Engineering	11 国際会議録 Dry Etch Damage in InN, InGaN and InAlN Pearton, S. J., Lee, J. W., MacKenzie, J. D., Vartuli, C. B., Donovan, S. M., Abernathy, C. R., Shul, R. J., Ren, F., … MRS - Materials Research Society
6 国際会議録 High-speed broadband tunable lasers (Invited Paper) Adams,L.E., Nykolak,G., Bethea,C.G., Tanbun-Ek,T., People,R., Sergent,A.M., Sciortino,P.F.,Jr., Fullowan,T.R. SPIE-The International Society for Optical Engineering	12 国際会議録 Growth and Characterization of 1.55 p.m InGaAs/InGaAsP Multiple Quantum Well Fabry- Perot and DFB Lasers Grown by Low Pressure MOCVD McCrary, V.R., Ketelsen, L.J., Napholtz, S. G., Bruno, D., Slusky, S. E., Byrne, E.K., Chu, S.N.G., Brelvi, M., Thomas, … Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12