Mushroom Gates Fabricated Using a Quad-Layer Composed of Si02, Si3N4 and Resist with Metal Transfer Layer for GaAs PHEMT IC's
- 著者名:
T. Taylor L. Studebaker C. Li G. Zhou T. Ma D. Kuhn M. Mierzwinski - 掲載資料名:
- Proceedings of the Eighteenth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XVIII)
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 1993-27
- 発行年:
- 1993
- 開始ページ:
- 178
- 終了ページ:
- 183
- 総ページ数:
- 6
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770699 [1566770696]
- 言語:
- 英語
- 請求記号:
- E23400/940142
- 資料種別:
- 国際会議録
類似資料:
Trans Tech Publications |
7
国際会議録
Microstructure Evolution of Hybrid TiO2 Nanowire-Nanotube Structure Fabricated by Anodization
Trans Tech Publications |
Trans Tech Publications |
8
国際会議録
Defect formation in layered ionic crystals of (CnH2n+1NH3)2MCI4 : M= Cd, Cu, Mn; n= 1,2,3 and …
Society of Photo-optical Instrumentation Engineers |
Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |
10
国際会議録
Substrate Temperature and La0.9Sr0.1Ga0.8Mg0.2O3-δ Electrolyte Film Growth by Radio Frequency …
Trans Tech Publications |
Trans Tech Publications |
11
国際会議録
Controlled Synthesis of Mn3O4 and MnOOH by a Hydrothermal Method and Their Electrochemical Behaviors
Trans Tech Publications |
Electrochemical Society |