Influence of Post-annealing Temperature on the Properties of Ti-doped In₂O₃ Transparent Conductive Films by DC Ratio-frequency Sputtering

Influence of Post-annealing Temperature on the Properties of Ti-doped In₂O₃ Transparent Conductive Films by DC Ratio-frequency Sputtering

著者名:

Lei Li

掲載資料名:

Titanium dioxide nanomaterials : symposium held April 25-29, 2011, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

1352

発行年:

2012

開始ページ:

89

終了ページ:

96

総ページ数:

8

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781605113296 [1605113298]

言語:

英語

請求記号:

M23500/1352

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00050366
シリーズID:	PA00000011
会議名:	MRS Spring Meeting
回次:	2011
会議開催地:	San Francisco, California, USA
会議開催年:	2011.04.25-2011.04.29

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