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Wide-spectral-range, Expanded-beam Spectroscopic Ellipsometer and its Application for Imaging/Mapping of Graded Nanocrystalline Si:H Films

著者名:
A. Nemeth
D. Attygalle
L.R. Dahal
P. Aryal
Z. Huang
C. Salupo
P. Petrik
G. Juhasz
C. Major
O. Polgar
M. Fried
B. Pecz
R.W. Collins
さらに 8 件
掲載資料名:
Amorphous and polycrystalline thin-film silicon science and technology--2011 : symposium held April 25-29, 2011, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
1321
発行年:
2012
開始ページ:
267
終了ページ:
272
総ページ数:
6
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605112985 [1605112984]
言語:
英語
請求記号:
M23500/1321
資料種別:
国際会議録

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