Characterization of Textured PZT Thin Films Prepared by Sol-Gel Method onto Stainless Steel Substrates

Characterization of Textured PZT Thin Films Prepared by Sol-Gel Method onto Stainless Steel Substrates

著者名:

掲載資料名:

Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

1299

発行年:

2011

開始ページ:

97

終了ページ:

104

総ページ数:

8

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781605112763 [1605112763]

言語:

英語

請求記号:

M23500/1299

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00050357
シリーズID:	PA00000011
会議名:	MRS Fall Meeting
回次:	2010
会議開催地:	Boston, Massachusetts, USA
会議開催年:	2010.11.29-2010.12.03

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