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Effects of Argon to Oxygen Ratio and Post Annealing on R.F. Sputtered SnO₂ Thin Film for Ethylene Gas Detection

著者名:
掲載資料名:
Oxide nanoelectronics : symposium held November 29-December 3, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
1292
発行年:
2011
開始ページ:
111
終了ページ:
116
総ページ数:
6
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605112695 [1605112690]
言語:
英語
請求記号:
M23500/1292
資料種別:
国際会議録

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