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Micromachining of Thin 3C-SiC Films for Mechanical Properties Investigation

著者名:
J.F. Michaud
S. Jiao
A.E. Bazin
M. Portail
T. Chassagne
M. Zielinski
D. Alquier
さらに 2 件
掲載資料名:
Silicon Carbide 2010--materials, processing and devices : symposium held April 5-9, 2010, San Francisco, California
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
1246
発行年:
2010
開始ページ:
213
終了ページ:
220
総ページ数:
8
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605112237 [1605112232]
言語:
英語
請求記号:
M23500/1246
資料種別:
国際会議録

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