Effects of Growth Parameters on Surface-Morphological, Structural, Electrical and Optical Properties of AZO Films by RF Magnetron Sputtering
- 著者名:
Shou-Yi Kuo Wei-Ting Lin Liann-Be Chang Ming-Jer Jeng Yong-Tian Lu Sung-Cheng Hu - 掲載資料名:
- Zinc oxide and related materials--2009 : symposium held November 30-December 3, 2009, Boston, Massachusetts, USA
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 1201
- 発行年:
- 2010
- 開始ページ:
- 141
- 終了ページ:
- 146
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781605111742 [1605111740]
- 言語:
- 英語
- 請求記号:
- M23500/1201
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
7
学術雑誌
Enhanced deposition of ZnO films by Li doping using radio frequency reactive magnetron sputtering
Editorial department of International journal of minerals, metallurgy and materials |
Trans Tech Publications |
American Society of Mechanical Engineers |
Trans Tech Publications |
9
国際会議録
AZO films prepared by r.f. magnetron sputtering: structural, electrical, and optical properties
Society of Photo-optical Instrumentation Engineers |
Editorial Office of Trans. NFsoc., Central-South University of Technology |
MRS - Materials Research Society |
Wiley-VCH |
Materials Research Society |
Trans Tech Publications |
Materials Research Society |